Abstract
We report on the preparation of an all solid-state thin film micro-supercapacitor using RuO2 electrode film and LiPON electrolyte film on a Pt/Ti/Si substrate with dual target dc and rf reactive sputtering. Room temperature charge-discharge measurements based on a symmetrical RuO2/LiPON/RuO2 structure clearly demonstrated the cyclibility dependence of the RuO2 electrode on the microstructure. Using both glancing angle X-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the characteristics of the thin film supercapacitor are dependent on the microstructure of the RuO2 film. In addition, high-resolution electron transmission microscopy (HREM) analysis after cycling demonstrates that the interface layer formed by interfacial reaction between the LiPON and RuO2 acts as the main factor in the degradation of the performance of the thin film micro-supercapacitor.
Similar content being viewed by others
References
K. Schokoohi, J. M. Tarascon, and B. J. Wilkens,Appl. Phys. Lett. 59, 1260 (1991).
H. K. Kim, O. W. Ok, T. Y. Seong, E. J. Jeon, W. I. Cho, and Y. S. Yoon,J. Vac. Sci. Tech. A 19, 2549 (2001).
B. J. Neudecker, N. J. Dudney, and J. B. Bates,J. Electrochem. Soc. 147, 517 (2001).
H. K. Kim, T. Y. Seong, J. H. Lim, W. I. Cho, and Y. S. Yoon,J. Power Sources 102, 167 (2001).
H. K. Kim, T. Y. Seong, and Y. S. Yoon,Kor. Electrochem. Solid-State Lett. 5, A252 (2002).
S. D. Jones, and J. R. Akridge,Solid State Ionics 53–56, 628 (1992).
B. Wang, J. B. Bates, F. X. Hart, B. C. Sales, R. A. Zuhr, and J. D. Robertson,J. Electrochem. Soc. 143, 3203 (1996).
H. K. Kim, T. Y. Soeng, E. J. Jeon, Y. W. Ok, W. I. Cho, and Y. S. Yoon,J. Kor. Ceram. Soc. 38, 274 (2001).
B. E. Conway,Electrochemical Supercapacitor, Kluwer Academic/Plenum Publ., New York (1999).
H. K. Kim, T. Y. Soeng, J. H. Lim, E. J. Jeon, W. I. Cho, and Y. S. Yoon,J. Kor. Mater. Soc. 11, 335 (2001).
J. P. Zheng, P. J. Cygan, and T. R. Jow,J. Electrochem. Soc. 142, 2699 (1995).
Y. S. Yoon, W. I. Cho, J. H. Lim, and D. J. Choi,J. Power Source 101, 126 (2001).
J. H. Lim, D. J. Choi, B. H. Son, S. C. Nam, W. I. Cho, and Y. S. Yoon,The 197th Meeting of the Electrochemical Society, Abstract no. 44, Toronto, Canada (2000).
J. H. Lim, D. J. Choi, H. K. Kim, W. I. Cho, and Y. S. Yoon,J. Electrochem. Soc. 148, A278 (2001).
I. H. Kim, and K. B. Kim,Electrochem. Solid State Lett. 4, A62 (2001).
J. H. Lim, D. J. Choi, W. I. Cho, and Y. S. Yoon,J. Kor. Phys. Soc. 39, 382 (2001).
J. G. Lee, Y. T. Kim, S. K. Kim, and S. H. Choh,J. Appl. Phys. 77, 5473 (1995).
Y. Abe, Y. Kaga, M. Kawamura, and K. Sasaki,J. Vac. Sci. Tech. B. 18, 1348 (2000).
H. K. Kim, T. Y. Seong, E. J. Jeon, W. I. Cho, and Y. S. Yoon,J. Vac. Sci. Tech. A (be submitted).
J. S. Jang, I. C. Chang, H. K. Kim, S. Lee, T. Y. Seong, and S. J. Park,Appl. Phys. Lett. 74, 70 (1999).
H. K. Kim, S. H. Han, T. Y. Seong, and W. K. Choi,Appl. Phys. Lett. 77, 1647 (2000).
Author information
Authors and Affiliations
Corresponding author
Additional information
This article is based on a presentation made in the 2002 Korea-US symposium on the “Phase Transformations of Nano-Materials”, organized as a special program of the 2002 Annual Meeting of the Korean Institute of Metals and Materials, held at Yonsei University, Seoul, Korea on October 25–26, 2002.
Rights and permissions
About this article
Cite this article
Kim, HK., Seong, TY., Lee, S.M. et al. Charge-discharge induced phase transformation of RuO2 electrode for thin film supercapacitor. Met. Mater. Int. 9, 239–246 (2003). https://doi.org/10.1007/BF03027042
Issue Date:
DOI: https://doi.org/10.1007/BF03027042