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Two-dimensional nanoparticle arrays formed by dewetting of thin gold films deposited on pre-patterned substrates

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Abstract

We demonstrate the formation of accurate 2D gold nanoparticle arrays via solid-state dewetting on a pre-patterned substrate. The annealing-induced dewetting of Au film on both flat and pre-patterned SiO2 substrates is investigated. The pre-patterned structures affect clearly the formation of nanoparticles, and there is a depth effect of the pre-patterned grooves on the formation of nanoparticles during dewetting. Especially in pre-patterned areas with deep grid grooves (depth 150 nm) there is almost one single particle formed in the flat areas of every unit square, thus resulting in a very periodic 2D structure of gold nanoparticles.

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Acknowledgments

The authors thank Mr. Joachim Döll from the Department of Micromechanical Systems at Ilmenau University of Technology for deposition of Au films.

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Authors and Affiliations

  1. Department of Materials for Electronics, Institute of Materials Engineering and Institute of Micro- and Nanotechnologies MacroNano®, Ilmenau University of Technology, POB 10 05 65, 98684, Ilmenau, Germany

    Dong Wang & Peter Schaaf

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  1. Dong Wang
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  2. Peter Schaaf
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Correspondence to Dong Wang.

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Wang, D., Schaaf, P. Two-dimensional nanoparticle arrays formed by dewetting of thin gold films deposited on pre-patterned substrates. J Mater Sci: Mater Electron 22, 1067–1070 (2011). https://doi.org/10.1007/s10854-010-0260-2

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  • DOI: https://doi.org/10.1007/s10854-010-0260-2

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