Thin film growth by the pulsed laser assisted deposition technique

doi:10.1016/0169-4332(95)00535-8

Applied Surface Science

Volumes 96–98, 2 April 1996, Pages 630-642

https://doi.org/10.1016/0169-4332(95)00535-8 Get rights and content

Abstract

Pulsed laser-assisted deposition (PLD) has recently emerged as a most promising film growth technique, at least for basic research, as this has been best demonstrated for highT_c superconducting oxides and YBa₂Cu₃O_7−x in particular. This article briefly outlines the specific features of this technique and its potential, illustrated by the example of the growth of YBa₂Cu₃O_7−x thin films aimed at the preparation of microwave passive devices. The perspectives of development of PLD and its ability to become an industrial process are discussed.

Reference (84)

FeenstraR. et al.
J. Appl. Phys.
(1991)
FriedmannT.A. et al.
J. Appl. Phys.
(1994)
SinghR.K. et al.
J. Mater. Res.
(1992)
VenkatesanT. et al.
Appl. Phys. Lett.
(1987)
NoorBatchaI. et al.
J. Chem. Phys.
(1987)
LeeS.G. et al.
Appl. Phys. Lett.
(1994)
PanznerM. et al.
Appl. Surf. Sci.
(1996)
SmithH.M. et al.
Appl. Opt.
(1965)
BednorzJ.G. et al.
Z. Phys. B
(1986)
WuM.K. et al.
Phys. Rev. Lett.
(1987)

ChewN.G. et al.

Appl. Phys. Lett.

(1990)

ChambonnetD. et al.

J. Alloys Compounds

(1993)

RimaiL. et al.

J. Appl. Phys.

(1993)

RistO. et al.

Mater. Lett.

(1991)

TreeceR.E. et al.

Appl. Phys. Lett.

(1994)

BiunnoN. et al.

Appl. Phys. Lett.

(1989)

KoolsJ.C.S. et al.

J. Vac. Sci. Technol. A

(1992)

JoW. et al.

Appl. Phys. Lett.

(1995)

JoW. et al.

Appl. Phys. Lett.

(1993)

SrikantV. et al.

J. Appl. Phys.

(1995)

FunakoshiH. et al.

Jpn. J. Appl. Phys. B

(1994)

YoonS.G. et al.

J. Appl. Phys.

(1994)

Wiener-AvnearE.

Appl. Phys. Lett.

(1994)

AucielloO. et al.

J. Appl. Phys.

(1993)

SimionB.M. et al.

Appl. Phys. Lett.

(1995)

LeT.M. et al.

J. Appl. Phys.

(1995)

McCormackM. et al.

Appl. Phys. Lett.

(1994)

XiongF. et al.

Appl. Phys. Lett.

(1994)

LiuZ.G. et al.

J. Appl. Phys.

(1994)

AgostinelliJ.A. et al.

Appl. Phys. Lett.

(1993)

YoudenK.E. et al.

Appl. Phys. Lett.

(1991)

ShibataY. et al.

J. Appl. Phys.

(1995)

MarshA.M. et al.

Appl. Phys. Lett.

(1993)

CraciumV. et al.

Appl. Phys. Lett.

(1994)

TarsaE.J. et al.

Appl. Phys. Lett.

(1993)

ZhengJ.P. et al.

Appl. Phys. Lett.

(1993)

KimD.K. et al.

Appl. Phys. Lett.

(1994)

ValenzuelaA.A. et al.

Appl. Phys. Lett.

(1989)

WeigelR. et al.

IEEE MTT-S Dig.

(1993)

NewmanH.S. et al.

IEEE Trans. Magn.

(1991)

BorghsG. et al.

J. Phys.

(1994)

SuzukiK. et al.

Appl. Supercond.

(1993)

NegreteG.V.

Microwave Opt. Tech. Lett.

(1993)

EgamiY. et al.

Jpn. J. Appl. Phys. B

(1991)

SajjadiA. et al.

Appl. Phys. Lett.

(1993)

Che´enneA. et al.

TangY. et al.

Jpn. J. Appl. Phys. A

(1992)

RenZ.F. et al.

Appl. Phys. Lett.

(1994)

MiyashitaS. et al.

Jpn. J. Appl. Phys. A

(1994)

KanaiM. et al.

Appl. Phys. Lett.

(1990)

ContourJ.P. et al.

Jpn. J. Appl. Phys. B

(1993)

LiX. et al.

Jpn. J. Appl. Phys. A

(1994)

IchikawaN. et al.

Jpn. J. Appl. Phys. B

(1994)

CoehoornR. et al.

J. Magn. Magn. Mater.

(1993)

CheriefN. et al.

J. Magn. Magn. Mater.

(1993)

DhoteA.M. et al.

Appl. Phys. Lett.

(1994)

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Thin film growth by the pulsed laser assisted deposition technique

Abstract

J. Appl. Phys.

J. Appl. Phys.

J. Mater. Res.

Appl. Phys. Lett.

J. Chem. Phys.

Appl. Phys. Lett.

Appl. Surf. Sci.

Appl. Opt.

Z. Phys. B

Phys. Rev. Lett.

Appl. Phys. Lett.

J. Alloys Compounds

J. Appl. Phys.

Mater. Lett.

Appl. Phys. Lett.

Appl. Phys. Lett.

J. Vac. Sci. Technol. A

Appl. Phys. Lett.

Appl. Phys. Lett.

J. Appl. Phys.

Jpn. J. Appl. Phys. B

J. Appl. Phys.

Appl. Phys. Lett.

J. Appl. Phys.

Appl. Phys. Lett.

J. Appl. Phys.

Appl. Phys. Lett.

Appl. Phys. Lett.

J. Appl. Phys.

Appl. Phys. Lett.

Appl. Phys. Lett.

J. Appl. Phys.

Appl. Phys. Lett.

Appl. Phys. Lett.

Appl. Phys. Lett.

Appl. Phys. Lett.

Appl. Phys. Lett.

Appl. Phys. Lett.

IEEE MTT-S Dig.

IEEE Trans. Magn.

J. Phys.

Appl. Supercond.

Microwave Opt. Tech. Lett.

Jpn. J. Appl. Phys. B

Appl. Phys. Lett.

Jpn. J. Appl. Phys. A

Appl. Phys. Lett.

Jpn. J. Appl. Phys. A

Appl. Phys. Lett.

Jpn. J. Appl. Phys. B

Jpn. J. Appl. Phys. A

Jpn. J. Appl. Phys. B

J. Magn. Magn. Mater.

J. Magn. Magn. Mater.

Appl. Phys. Lett.