Electromigration: A review
References (130)
- et al.
Electromigration in thin-film for microelectronics
Microelectron. Reliab.
(1993) - et al.
Electromigration in thin-film interconnection lines: models, methods and results
Mat. Sci. Reports
(1991) - et al.
Current-induced marker motion in gold wires
J. Phys. Chem. Solids
(1961) Comment on Lodder's “exact” electromigration theory
Solid State Commun.
(1989)Stress and electromigration in Al-lines of integrated circuits
Acta Metall. Mater.
(1992)Berkeley Reliability Simulator BERT: An IC reliability simulator
Microelect. J.
(1992)- et al.
Electromigration testing of TiW/Al and TiW/AlCu conductors
Thin Solid Films
(1978) - et al.
Electromigration-resistant CuPd alloy films
Thin Solid Films
(1993) Electromigration in AlCu thin films with polyimide passivation
Thin Solid Films
(1982)Metallization for very large scale integrated circuits
Thin Solid Films
(1982)
Electromigration failure of contacts and vias in submicron integrated circuit metallizations
Microelectron. Reliab.
(1996)
Electromigration in thin aluminum films
J. Appl. Phys.
(1968)
Theory of the direct force in electromigration
Phys. Rev. B.
(1985)
Fundamental questions in the theory of electromigration
IBM Res. Develop.
(1988)
Drawbacks to using NIST electromigration test-structures to test bamboo metal lines
IEEE Trans. Elect. Dev.
(1994)
Electromigration in thin aluminum films on titanium nitride
J. Appl. Phys.
(1975)
Mass transport of aluminum by momentum exchange with conducting electrons
Reliability modeling for electromigration failure
Quality and Reliab. Engng Int
(1994)
A model for conductor failure considering diffusion concurrently with electromigration in a current exponent of 2
J. Appl. Phys.
(1986)
The finite electromigration boundary value problem
J. Mater. Res.
(1994)
Electromigration failure in a finite conductor with a single blocking boundary
J. Appl. Phys.
(1994)
Computer simulation of electromigration in thin-film metal conductors
J. Appl. Phys.
(1994)
Electromigration physical modeling of failure in thin film structures
SPIE Vol. 1596 Metallization: Performance and Reliability Issues for VLSI and VLSI
(1991)
Current density dependence of electromigration failure of submicron width, multilayer aluminum alloy conductors
Appl. Phys. Lett.
(1995)
Electromigration-induced failure in passivated aluminum—based metallizations-the dependence on temperature and current density
Appl. Phys. Lett.
(1992)
The electromigration failure distribution: the fine-line case
J. Appl. Phys.
(1991)
Statistical distributions of stress and clectromigration induced failure
SPIE Vol. 1805 Submicrometer Metallization
(1992)
Electromigration reliability of VLSI interconnect
Digital Technical J.
(1992)
Dependence of electromigration-induced failure time on length and width of aluminum thin-film conductors
J. Appl. Phys.
(1970)
J. Appl. Phys.
(1970)
Reduction of electromigration-induced failure in aluminum metallization through anodization
Electromigration studies on aluminumcopper stripes
Solid State Tech.
(May 1973)
The distribution of electromigration failures
Aluminum electromigration lifetime variation with linewidth: the effects of changing stress conditions
Reproducibility of electromigration measurements
IEEE Trans. on Elect. Dev.
(1987)
Electromigration—a brief survey and some recent results
IEEE Trans. on Elect. Dev.
(1969)
Current limitations of thin film conductors
The implications of scaling on VLSI reliability
Interconnection and electromigration scaling theory
Trans. Elect. Dev.
(1987)
Electromigration resistance of fine-line Al for VLSI applications
A model for the width dependence of electromigration lifetimes in aluminum thin-film stripes
Appl. Phys. Lett.
(1980)
Thermal analysis of electromigration test structures
IEEE Trans. Elect. Dec.
(1987)
A new method for detecting electromigration failure in VLSI metallization
IEEE J. Solid-State Cir.
(1984)
Use of early resistance and early TCR changes to predict reliability of on-chip interconnects
Quality and Reliab. Engng Int.
(1994)
Electromigration testing of Ti/AlSi metallization for integrated circuits
Effective kinetic variations with stress-duration for multilayered metallizations
Electromigration-induced short circuit failure
The importance of the short-circuit failure mode in aluminum clectromigration
J. Vac. Sci. Technol.
(1987)
Statistical metallurgical model for electromigration failure in aluminum thin-film conductors
J. Appl. Phys.
(1971)
Cited by (217)
Repair of embrittlement induced by different hydride configurations by dissolving partial hydrides using pulsed electric current
2024, International Journal of Hydrogen EnergyElectromigration characteristics of CuAl<inf>2</inf>
2022, Journal of Alloys and CompoundsThree-dimensional imaging of integrated-circuit activity using quantum defects in diamond
2024, Physical Review Applied
- †
Currently at Sandia Technologies, P.O. Box 23338, Albuquerque, NN 87192 U.S.A.
Copyright © 1997 Published by Elsevier Ltd.