Raman microprobe analysis of chemically revealed extended defects in GaAs

, , and

Published under licence by IOP Publishing Ltd
, , Citation J Jimenez et al 1992 Semicond. Sci. Technol. 7 A288 DOI 10.1088/0268-1242/7/1A/055

0268-1242/7/1A/A288

Abstract

The Raman microprobe is used for characterising chemically revealed defects in as-grown GaAs. Different microstructures were scanned with 1 mu m spatial resolution. Emphasis is paid to the breaking down of the Raman-backscattering selection rules. Precipitates and twins are studied in semi-insulating GaAs. Coupled phonon-plasmon modes are analysed in Te-doped GaAs (ND-NA approximately=1017 cm-3); dislocation grain boundaries and hillocks are scanned by the Raman microprobe, revealing misorientation and free carrier effects.

Export citation and abstract BibTeX RIS

Please wait… references are loading.
10.1088/0268-1242/7/1A/055