Skip to content
Publicly Available Published by De Gruyter October 4, 2010

Assembly and integration of semiconductor nanowires for functional nanosystems

  • Guihua Yu and Charles M. Lieber

Central to the bottom-up paradigm of nanoscience, which could lead to entirely new and highly integrated functional nanosystems, is the development of effective assembly methods that enable hierarchical organization of nanoscale building blocks over large areas. Semiconductor nanowires (NWs) represent one of the most powerful and versatile classes of synthetically tunable nanoscale building blocks for studies of the fundamental physical properties of nanostructures and the assembly of a wide range of functional nanoscale systems. In this article, we review several key advances in the recent development of general assembly approaches for organizing semiconductor NW building blocks into designed architectures, and the further integration of ordered structures to construct functional NW device arrays. We first introduce a series of rational assembly strategies to organize NWs into hierarchically ordered structures, with a focus on the blown bubble film (BBF) technique and chemically driven assembly. Next, we discuss significant advances in building integrated nano-electronic systems based on the reproducible assembly of scalable NW crossbar arrays, such as high-density memory arrays and logic structures. Lastly, we describe unique applications of assembled NW device arrays for studying functional nanoelectronic–biological interfaces by building well-defined NW-cell/tissue hybrid junctions, including the highly integrated NW–neuron interface and the multiplexed, flexible NW–heart tissue interface.

References

1 K. E. Drexler. Nanosystems: Molecular Machinery, Manufacturing, and Computation, John Wiley, New York (1992).Search in Google Scholar

2 G. Timp (Ed.). Nanotechnology, Springer-Verlag, New York (1999).10.1007/978-1-4612-0531-9Search in Google Scholar

3 C. M. Lieber. MRS Bull.28, 486 (2003).10.1557/mrs2003.144Search in Google Scholar

4 10.1038/scientificamerican0901-58, C. M. Lieber. Sci. Am.285, 58 (2001).Search in Google Scholar PubMed

5 10.1002/smll.200400130, G. M. Whitesides. Small1, 172 (2005).Search in Google Scholar PubMed

6 10.1038/nbt927, A. P. Alivisatos. Nat. Biotechnol.22, 47 (2004).Search in Google Scholar PubMed

7 P. L. McEuen. Phys. World13, 31 (2000).10.1088/2058-7058/13/6/26Search in Google Scholar

8 10.1038/scientificamerican0600-86, M. A. Reed, J. A. Tour. Sci. Am.282, 86 (2000).Search in Google Scholar PubMed

9 10.1038/35051047, X. Duan, Y. Huang, Y. Cui, J. Wang, C. M. Lieber. Nature409, 66 (2001).Search in Google Scholar PubMed

10 10.1126/science.291.5505.851, Y. Cui, C. M. Lieber. Science291, 851 (2001).Search in Google Scholar PubMed

11 10.1063/1.122477, R. Martel, T. Schmidt, H. R. Shea, T. Hertel, P. Avouris. Appl. Phys. Lett.73, 2447 (1998).Search in Google Scholar

12 10.1021/jp0271054, M. S. Arnold, P. Avouris, Z. W. Pan, Z. L. Wang. J. Phys. Chem. B107, 659 (2002).Search in Google Scholar

13 S. J. Tans, R. M. Verschueren, C. Dekker. Nature393, 49 (1998).10.1038/29954Search in Google Scholar

14 Z. Yao, H. W. C. Postma, L. Balents, C. Dekker. Nature402, 273 (1999).10.1038/46241Search in Google Scholar

15 10.1126/science.288.5465.494, M. S. Fuhrer, J. Nygrad, L. Shih, M. Forero, Y. G. Yoon, M. S. C. Mazzoni, H. J. Choi, J. Ihm, S. G. Louie, A. Zettl, P. L. McEuen. Science288, 494 (2000).Search in Google Scholar PubMed

16 10.1126/science.1066192, Y. Huang, X. Duan, Y. Cui, L. Lauhon, K. Kim, C. M. Lieber. Science294, 1313 (2001).Search in Google Scholar PubMed

17 10.1002/smll.200400030, Y. Huang, X. Duan, C. M. Lieber. Small1, 142 (2005).Search in Google Scholar PubMed

18 10.1038/nature01353, X. Duan, Y. Huang, R. Argarawal, C. M. Lieber. Nature421, 241 (2003).Search in Google Scholar PubMed

19 10.1063/1.1587878, X. D. Bai, P. X. Gao, Z. L. Wang, E. G. Wang. Appl. Phys. Lett.82, 4806 (2003).Search in Google Scholar

20 10.1021/nl060351x, B. A. Buchine, W. L. Hughes, F. L. Degertekin, Z. L. Wang. Nano Lett.6, 1155 (2006).Search in Google Scholar PubMed

21 10.1126/science.1062711, Y. Cui, Q. Wei, H. Park, C. M. Lieber. Science293, 1289 (2001).Search in Google Scholar PubMed

22 10.1073/pnas.0406159101, F. Patolsky, G. Zheng, O. Hayden, M. Lakadamyali, X. Zhuang, C. M. Lieber. Proc. Natl. Acad. Sci. USA101, 14017 (2004).Search in Google Scholar PubMed PubMed Central

23 10.1038/nbt1138, G. Zheng, F. Patolsky, Y. Cui, W. U. Wang, C. M. Lieber. Nat. Biotechnol.23, 1294 (2005).Search in Google Scholar PubMed

24 10.1038/nature06181, B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang, C. M. Lieber. Nature449, 885 (2007).Search in Google Scholar PubMed

25 10.1021/nl8023438, T. J. Kempa, B. Tian, D. R. Kim, J. Hu, X. Zheng, C. M. Lieber. Nano Lett.8, 3456 (2008).Search in Google Scholar PubMed

26 10.1039/b718703n, B. Tian, T. J. Kempa, C. M. Lieber. Chem. Soc. Rev.38, 16 (2009).Search in Google Scholar PubMed

27 10.1126/science.1124005, Z. L. Wang, J. H. Song. Science312, 242 (2006).Search in Google Scholar PubMed

28 10.1126/science.1139366, X. D. Wang, J. H. Song, J. Liu, Z. L. Wang. Science316, 102 (2007).Search in Google Scholar PubMed

29 10.1021/nl015606f, V. Derycke, R. Martel, J. Appenzeller, P. Avouris. Nano Lett.1, 453 (2001).Search in Google Scholar

30 10.1126/science.1065824, A. Bachtold, P. Hadley, T. Nakanishi, C. Dekker. Science294, 1317 (2001).Search in Google Scholar PubMed

31 10.1126/science.1090899, Z. Zhong, D. Wang, Y. Cui, M. W. Bockrath, C. M. Lieber. Science302, 1377 (2003).Search in Google Scholar PubMed

32 10.1038/4341085a, R. S. Friedman, M. C. McAlpine, D. S. Ricketts, D. Ham, C. M. Lieber. Nature434, 1085 (2005).Search in Google Scholar PubMed

33 10.1038/nature05462, J. E. Green, J. W. Choi, A. Boukai, Y. Bunimovich, E. Johnston-Halperin, E. DeIonno, Y. Luo, B. A. Sheriff, K. Xu, Y. S. Shin, H. R. Tseng, J. F. Stoddart, J. R. Heath. Nature445, 414 (2007).Search in Google Scholar PubMed

34 10.1021/ar9700365, J. Hu, T. W. Odom, C. M. Lieber. Acc. Chem. Res.32, 435 (1999).Search in Google Scholar

35 P. Yang. MRS Bull.30, 85 (2005).10.1557/mrs2005.26Search in Google Scholar

36 C. M. Lieber, Z. L. Wang. MRS Bull.32, 99 (2007).Search in Google Scholar

37 10.1088/0022-3727/39/21/R01, W. Lu, C. M. Lieber. J. Phys. D: Appl. Phys.39, R387 (2006).Search in Google Scholar

38 10.1007/s00339-006-3720-z, R. Agarwal, C. M. Lieber. Appl. Phys. A85, 209 (2006).Search in Google Scholar

39 10.1126/science.291.5504.630, Y. Huang, X. Duan, Q. Wei, C. M. Lieber. Science291, 630 (2001).Search in Google Scholar PubMed

40 10.1143/JJAP.43.4465, D. Whang, S. Jin, C. M. Lieber. Jpn. J. Appl. Phys.43, 4465 (2004).Search in Google Scholar

41 10.1038/425243a, P. Yang. Nature425, 243 (2003).Search in Google Scholar PubMed

42 10.1038/nnano.2007.150, G. Yu, A. Cao, C. M. Lieber. Nat. Nanotechnol.2, 372 (2007).Search in Google Scholar PubMed

43 10.1039/b713697h, G. Yu, X. Li, C. M. Lieber, A. Cao. J. Mater. Chem.18, 728 (2008).Search in Google Scholar

44 10.1021/nl063056l, A. Javey, S. Nam, R. S. Friedman, H. Yan, C. M. Lieber. Nano Lett.7, 773 (2007).Search in Google Scholar PubMed

45 10.1063/1.1290272, P. A. Smith, C. D. Nordquist, T. N. Jackson, T. S. Mayer. Appl. Phys. Lett.77, 1399 (2000).Search in Google Scholar

46 10.1364/OPEX.13.008906, R. Agarwal, K. Ladavac, Y. Roichman, G. Yu, C. M. Lieber, D. G. Grier. Opt. Express13, 8906 (2005).Search in Google Scholar

47 10.1038/nmat1563, P. Pauzauskie, A. Radenovic, E. Trepagnier, H. Shroff, P. Yang, J. Liphardt. Nat. Mater.5, 97 (2006).Search in Google Scholar PubMed

48 10.1021/cm047955r, C. M. Hangarter, N. V. Myung. Chem. Mater.17, 1320 (2005).Search in Google Scholar

49 10.1021/nl049659j, S. Jin, D. Whang, M. C. McAlpine, R. S. Friedman, Y. Wu, C. M. Lieber. Nano Lett.4, 915 (2004).Search in Google Scholar

50 10.1021/nl071626r, Z. Fan, J. C. Ho, Z. A. Jacobson, R. Yerushalmi, R. L. Alley, H. Razavi, A. Javey. Nano Lett.8, 20 (2008).Search in Google Scholar PubMed

51 10.1073/pnas.0911713106, S. W. Nam, X. Jiang, Q. Xiong, D. Ham, C. M. Lieber. Proc. Natl. Acad. Sci. USA106, 21035 (2009).Search in Google Scholar PubMed PubMed Central

52 10.1021/nl0703727, A. Vijayaraghavan, S. Blatt, D. Weissenberger, M. Oron-Carl, F. Hennrich, D. Gerthsen, H. Hahn, R. Krupke. Nano Lett.7, 1556 (2007).Search in Google Scholar PubMed

53 10.1038/425036a, S. G. Rao, L. Huang, W. Setyawan, S. Hong. Nature425, 36 (2003).Search in Google Scholar

54 10.1038/nnano.2006.46, M. Lee, J. Im, B. Y. Lee, S. Myung, J. Kang, L. Huang, Y.-K. Kwon, S. Hong. Nat. Nanotechnol.1, 66 (2006).Search in Google Scholar

55 10.1126/science.1091022, K. Keren, R. S. Berman, E. Buchstab, U. Sivan, E. Braun. Science302, 1380 (2003).Search in Google Scholar

56 G. Yu, A. Cao, C. M. Lieber. Manuscript submitted for publication.Search in Google Scholar

57 G. Yu, C. M. Lieber. Unpublished results.Search in Google Scholar

58 10.1021/nl073224p, Y. Dong, G. Yu, M. C. McAlpine, W. Lu, C. M. Lieber. Nano Lett.8, 386 (2008).Search in Google Scholar

59 G. Yu, Y. Dong, Y. Wu, H. Yan, W. Lu, C. M. Lieber. Manuscript submitted for publication.Search in Google Scholar

60 10.1002/1439-7641(20020617)3:6<519::AID-CPHC519>3.0.CO;2-2, Y. Luo, C. P. Collier, K. Nielsen, J. Jeppesen, J. Perkins, E. DeIonno, A. Pease, J. F. Stoddart, J. R. Heath. ChemPhysChem3, 519 (2002).Search in Google Scholar

61 10.1109/MDT.2005.136, W. R. Davis, J. Wilson, S. Mick, J. Xu, H. Hua, C. Mineo, A. M. Sule, M. Steer, P. D. Franzon. IEEE Des. Test Comput.22, 498 (2005).Search in Google Scholar

62 10.1109/MDT.2005.134, C. Liu, I. Ganusov, M. Burtscher, S. Tiwari. IEEE Des. Test Comput.22, 556 (2005).Search in Google Scholar

63 10.1038/nature04796, J. Xiang, W. Lu, Y. Hu, Y. Wu, H. Yan, C. M. Lieber. Nature441, 489 (2006).Search in Google Scholar

64 10.1109/EDL.1984.25897, K. Hiranaka, T. Yamaguchi, S. Yanagisawa. IEEE Electron Device Lett.5, 224 (1984).Search in Google Scholar

65 10.1557/JMR.2004.0263, W. Clemens, I. Fix, J. Ficker, A. Knobloch, A. Ullmann. J. Mater. Res.19, 1963 (2004).Search in Google Scholar

66 10.1126/science.1132394, J. H. Ahn, H. S. Kim, K. J. Lee, S. Jeon, S. J. Kang, Y. Sun, R. G. Nuzzo, J. A. Rogers. Science314, 1754 (2006).Search in Google Scholar

67 F. Patolsky, B. P. Timko, G. Zheng, C. M. Lieber. MRS Bull.32, 142 (2007).Search in Google Scholar

68 10.2217/17435889.1.1.51, F. Patolsky, G. Zheng, C. M. Lieber. Nanomedicine1, 51 (2006).Search in Google Scholar

69 10.1073/pnas.0507304103, B. P. Helmke, A. R. Minerick. Proc. Natl. Acad. Sci. USA103, 6419 (2006).Search in Google Scholar

70 C. M. Niemeyer, C. A. Mirkin. Nanobiotechnology: Concepts, Applications and Perspectives, Wiley-VCH, Weinheim (2004).Search in Google Scholar

71 10.1073/pnas.0406368102, W. U. Wang, C. Chen, K. Lin, Y. Fang, C. M. Lieber. Proc. Natl. Acad. Sci. USA102, 3208 (2005).Search in Google Scholar

72 10.1016/S0956-5663(03)00175-1, A. P. Soldatkin, J. Montoriol, W. Sant, C. Martelet, N. Jaffrezic-Renault. Biosens. Bioelectron.19, 131 (2003).Search in Google Scholar

73 10.1016/j.snb.2004.04.104, W. Sant, M. L. Pourciel-Gouzy, J. Launay, T. D. Conto, R. Colin, A. Martinez, P. Temple-Boyer. Sens. Actuators, B103, 260 (2004).Search in Google Scholar

74 10.1126/science.1128640, F. Patolsky, B. P. Timko, G. Yu, Y. Fang, A. B. Greytak, G. Zheng, C. M. Lieber. Science313, 1100 (2006).Search in Google Scholar PubMed

75 M. E. Larkum, J. J. Zhu. J. Neurosci.22, 6991 (2002).Search in Google Scholar

76 10.1523/JNEUROSCI.4209-04.2005, D. A. Wagenaar, R. Madhavan, J. Pine, S. M. Potter. J. Neurosci.25, 680 (2005).Search in Google Scholar PubMed PubMed Central

77 10.1073/pnas.0914737107, Q. Qing, S. K. Pal, B. Tian, X. Duan, B. P. Timko, T. Cohen-Karni, V. N. Murthy, C. M. Lieber. Proc. Natl. Acad. Sci. USA107, 1882 (2010).Search in Google Scholar PubMed PubMed Central

78 10.1021/nl900096z, B. P. Timko, T. Cohen-Karni, G. Yu, Q. Qing, B. Tian, C. M. Lieber. Nano Lett.9, 914 (2009).Search in Google Scholar PubMed PubMed Central

79 10.1073/pnas.0902752106, T. Cohen-Karni, B. P. Timko, L. E. Weiss, C. M. Lieber. Proc. Natl. Acad. Sci. USA106, 7309 (2009).Search in Google Scholar PubMed PubMed Central

Online erschienen: 2010-10-4
Erschienen im Druck: 2010-10-4

© 2013 Walter de Gruyter GmbH, Berlin/Boston

Downloaded on 23.4.2024 from https://www.degruyter.com/document/doi/10.1351/PAC-CON-10-07-06/html
Scroll to top button