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A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films

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Abstract

A new analysis of the deflection of square and rectangular membranes of varying aspect ratio under the influence of a uniform pressure is presented. The influence of residual stresses on the deflection of membranes is examined. Expressions have been developed that allow one to measure residual stresses and Young’s moduli. By testing both square and rectangular membranes of the same film, it is possible to determine Poisson’s ratio of the film. Using standard micromachining techniques, free-standing films of LPCVD silicon nitride were fabricated and tested as a model system. The deflection of the silicon nitride films as a function of film aspect ratio is very well predicted by the new analysis. Young’s modulus of the silicon nitride films is 222 ± 3 GPa and Poisson’s ratio is 0.28 ± 0.05. The residual stress varies between 120 and 150 MPa. Young’s modulus and hardness of the films were also measured by means of nanoindentation, yielding values of 216 ± 10 GPa and 21.0 ± 0.9 GPa, respectively.

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References

  1. D.W. Burns and H. Guckel, J. Vac. Sci. Technol . A 8 (4), 3606–3613 (1990).

    Google Scholar 

  2. J. W. Beams, in Mechanical Properties of Thin Films of Gold and Silver (John Wiley and Sons, Inc.), p. 183.

  3. .M.K. Small and W.D. Nix, J. Mater. Res . 7, 1553–1563 (1992).

    Article  Google Scholar 

  4. M. K. Small, J. J. Vlassak, and W. D. Nix, in Thin Films: Stresses and Mechanical Properties HI, edited by William D. Nix, John C. Bravman, Edward Arzt, and L. Ben Freund (Mater. Res. Soc. Symp. Proc. 239, Pittsburgh, PA, 1992).

    Google Scholar 

  5. H. Itozaki, Mechanical Properties of Composition Modulated Copper-Palladium, Ph.D. Dissertation, Northwestern University (1982).

  6. S. Timoshenko and S. Woinowski-Krieger, in Theory of Plates and Shells (McGraw-Hill, New York, 1987).

    Google Scholar 

  7. P. Lin, The In-Situ Measurement of Mechanical Properties of Multilayer-Coatings, Ph.D. Dissertation, Massachusetts Institute of Technology (1990).

  8. O. Tabata, K. Kawahata, S. Sugiyama, and I. Igarashi, Sensors and Actuators 20, 135–141 (1989).

    Article  Google Scholar 

  9. M. G. Allen, M. Mehregani, R. T. Howe, and S. D. Senturia, Appl. Phys. Lett . 51 (4), 241–243 (1987).

    Google Scholar 

  10. R.J. Jaccodine and W.A. Schlegel, J. Appl. Phys . 37 (6), 2429–2434 (1966).

    Article  Google Scholar 

  11. E.I. Bromley, J.N. Randall, D.C. Flanders, and R.W. Mountain, J. Vac. Sci. Technol . B 1 (4), 1364–1367 (1983).

    Google Scholar 

  12. S. P. Timoshenko and J. N. Goodier, in Theory of Elasticity (McGraw-Hill, New York, 1970).

    Google Scholar 

  13. M.F. Doerner and W.D. Nix, J. Mater. Res . 1, 601–609 (1986).

    Google Scholar 

  14. M. F. Doerner, Mechanical Properties of Metallic Thin Films on Substrates Using Sub-micron Indentation Methods and Thin Film Stress Measurement Techniques, Ph.D. Dissertation, Stanford University (1987).

  15. J. A. Taylor, J. Vac. Sci. Technol . A 9 (4), 2464–2468 (1991).

    Google Scholar 

  16. S. Hong, Free-standing Multi-layer Thin Film Microstructures for Electronic Systems, Ph.D. Dissertation, Stanford University (1991).

  17. M. Sekimoto, H. Yoshihara, and T. Ohkubo, J. Vac. Sci. Technol . 21 (4), 1017–1021 (1982).

    Article  Google Scholar 

  18. W.C. Oliver and G.M. Pharr, J. Mater. Res . 7, 1564–1583 (1992).

    Article  Google Scholar 

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Vlassak, J.J., Nix, W.D. A new bulge test technique for the determination of Young’s modulus and Poisson’s ratio of thin films. Journal of Materials Research 7, 3242–3249 (1992). https://doi.org/10.1557/JMR.1992.3242

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  • DOI: https://doi.org/10.1557/JMR.1992.3242

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